Edwards EXS Dry Screw Vacuum Pump

Models: EXS160, EXS250, EXS450, EXS750 | Manufacturer: Edwards

The Edwards EXS series Dry Screw Vacuum Pump features proven screw vacuum technology in a simple and robust package for industrial applications. The EXS series, available in models EXS160-750 and booster combinations, provides low maintenance costs, flexible control and connectivity, a compact design, reduced utility expenses, and energy efficiency, along with pumping speeds tailored for demanding industrial processes.

Product Specifications

Peak Pumping Speed

160–750 m³/hr (Up to 3,450 w/ Booster)

Ultimate Vacuum

1 × 10⁻² mbar (<1 × 10⁻³ w/ Booster)

Max Rotor Speed

Up to 6,600 rev/min

Noise Level (Silencer)

<64 dB(A) to <70 dB(A)

Electrical Supply

380-460V or 200-230V 3Ph, 50/60Hz

Max Exhaust Back Pressure

1.2 bara (17.4 psig)

Lubrication

PFPE Drynert 25/6

Ambient Temperature

5-40°C (41-104°F)

EXS Design and Features

Proven screw vacuum technology based on Edwards GXS pumps

Simple control philosophy supports easier installation and operation

VFD supports speed control for different processes and energy savings

Digital and analog I/O provide variable speed control

Modbus RTU included as standard for remote control flexibility

Non-contacting long-life seals with integral oil-blocking labyrinth seal

Six-litre-per-minute seal purge protects gearbox from contamination

Non-cantilever design provides secure rotor support and low vibration

Advanced bearings and low-vapour-pressure oil support service life

Reliable constant-flow cooling system supports compact design

Patented tapered variable-pitch Quinby profile screw design

GENIUS factory variants provide 24/7 remote access via GENIUS Portal

Applications

The Edwards EXS is suitable for applications across several industries, including:

Metallurgy

Roll web coating and hard coating (CVD/DLC)

Plasma Processes

Solar silicon crystal-pulling and PV lamination

Vacuum Chamber Evacuation

Lithium-Ion Battery Manufacturing

EXS Accessories and Systemization

Standard accessories are available for the EXS to suit different applications. They can be fully integrated with the pump to provide an efficient and safe system, with accessories designed to match the pumping capacities of the EXS range and optimise performance. Customer-specific systems are also available on request.